The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2005
Filed:
Aug. 02, 2002
Richard J. Bartlett, Boony Doon, CA (US);
Anthony P. Coniglio, San Jose, CA (US);
David A. Steele, San Jose, CA (US);
Richard J. Bartlett, Boony Doon, CA (US);
Anthony P. Coniglio, San Jose, CA (US);
David A. Steele, San Jose, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
A remote track editor system, method, and computer readable medium is provided to remotely edit track flows and recipes of semiconductor processing tools. The editor system includes a processing track, a track controller, and a remote track editor for remotely editing recipes of at least one semiconductor processing tool. The editor system communicates with remote terminals and accesses multiple flows and recipes stored on network databases through a SECS/GEM interface. The remote track editor edits recipes without interrupting the process track and correctly renumbers line and flow numbers of the recipes when editing, deleting, or inserting steps. The remote track editor also performs side-by-side comparisons of multiple recipes, verifies the contents of recipes to master recipes, and provides indicators of mismatches.