The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2005
Filed:
Jul. 06, 2002
Hubert Benzel, Pliezhausen, DE;
Heribert Weber, Nuertingen, DE;
Michael Bauer, Tuebingen, DE;
Hans Artmann, Magstadt, DE;
Thorsten Pannek, Stuttgart, DE;
Frank Schaefer, Tuebingen, DE;
Christian Krummel, Kirchentellinsfurt, DE;
Hubert Benzel, Pliezhausen, DE;
Heribert Weber, Nuertingen, DE;
Michael Bauer, Tuebingen, DE;
Hans Artmann, Magstadt, DE;
Thorsten Pannek, Stuttgart, DE;
Frank Schaefer, Tuebingen, DE;
Christian Krummel, Kirchentellinsfurt, DE;
paragon, Delbruck, DE;
Abstract
A micromechanical component includes a substrate and a cover layer deposited on the substrate, underneath the cover layer, a region of porous material being provided which mechanically supports and thermally insulates the cover layer. On the cover layer, a heating device is provided to heat the cover layer above the region; and above the region, a detector is provided to measure an electric property of a heated medium provided above the region on the cover layer.