The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2005
Filed:
Jan. 31, 2003
Applicants:
Wolfgang Lortz, Waechtersbach, DE;
Christoph Batz-sohn, Hanau, DE;
Gabriele Perlet, Grosskrotzenburg, DE;
Werner Will, Gelnhausen, DE;
Inventors:
Wolfgang Lortz, Waechtersbach, DE;
Christoph Batz-Sohn, Hanau, DE;
Gabriele Perlet, Grosskrotzenburg, DE;
Werner Will, Gelnhausen, DE;
Assignee:
Degussa AG, Duesseldorf, DE;
Primary Examiner:
Int. Cl.
CPC ...
H01L021/302 ; C09K013/00 ;
U.S. Cl.
CPC ...
Abstract
An aqueous dispersion is used in the chemical mechanical polishing of surfaces, particularly oxidic surfaces, such as silicon dioxide. The aqueous dispersion contains a powder of pyrogenically produced silicon dioxide doped with 0.01 and 3 wt. % aluminium oxide, relative to the total amount of powder, said powder having an average particle diameter in the dispersion of not more than 0.1 μm.