The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2005
Filed:
Sep. 20, 2001
Applicants:
Bjarni Bjarnason, Södra Sandby, SE;
Per Petersson, Lund, SE;
Inventors:
Bjarni Bjarnason, Södra Sandby, SE;
Per Petersson, Lund, SE;
Assignee:
Obducat Aktiebolag, Malmo, SE;
Primary Examiner:
Int. Cl.
CPC ...
C23F001/00 ;
U.S. Cl.
CPC ...
Abstract
In etching, an etchant () for etching of a substrate () is applied in a given pattern. Before etching, a resist layer () is applied to the substrate () in said pattern to define at least one exposed portion () of the substrate (). In order to minimize under etching, a passivating substance is arranged, before etching, on the substrate () to also define said pattern, i.e., at the periphery of the exposed portion (). The passivating substance is such as to form, during etching, an etch-protecting compound at the periphery.