The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2005
Filed:
Jan. 30, 2003
Applicant:
Masahiro Morisada, Tochigi, JP;
Inventor:
Masahiro Morisada, Tochigi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B027/58 ; G03B027/42 ; G05B011/01 ;
U.S. Cl.
CPC ...
Abstract
A stage control apparatus for controlling a motion of a stage. The apparatus includes a filter unit which eliminates a resonance frequency component contained in an input signal and outputs a control signal for controlling a motion of the stage, a generating unit which generates a frequency spectrum of a motion signal concerning a motion of the stage, a calculating unit which calculates coefficients of the filter unit based on the frequency spectrum, and a setting unit which sets the coefficients calculated by the calculation unit as the coefficients of the filter unit.