The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2005
Filed:
Jun. 26, 2003
Toshihiko Tsuji, Saitama, JP;
Takaaki Kimura, Konosu, JP;
Toshihiko Tsuji, Saitama, JP;
Takaaki Kimura, Konosu, JP;
Nikon Corporation, Tokyo, JP;
Abstract
The present invention provides an exposure method and exposure apparatus that enable the effects on an apparatus main body of heat generated by a control system to be suppressed when an error occurs in an air-conditioning system or temperature control system. In the exposure apparatus of the present invention, if an error occurs in an air-conditioning system () that air-conditions an interior of a chamber (to) in which an exposure body section (STP) is housed or occurs in a temperature control system () that controls a temperature of the exposure body section (STP), a power supply of a control system (to) that controls the exposure body section (STP) is shut down.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile