The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2005

Filed:

Jun. 28, 2001
Applicants:

Yuen Chuen Chan, Singapore, SG;

Xiangjun Mao, Singapore, SG;

Inventors:

Yuen Chuen Chan, Singapore, SG;

Xiangjun Mao, Singapore, SG;

Assignee:

NTU Ventures PTE. Ltd., Singapore, SG;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B019/00 ;
U.S. Cl.
CPC ...
Abstract

The invention provides a method of growing semiconductor epitaxial layers on a substrate comprising the steps of


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