The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2005
Filed:
Nov. 26, 2003
Kenji Nishi, Yokohama, JP;
Kenji Nishi, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A scanning exposure apparatus includes a masking blade provided between an optical integrator and an optical system, and which is movable in a predetermined direction on a plane perpendicular to an optical axis of the optical system. The masking blade has a pair of edges substantially parallel to each other and perpendicular to the predetermined direction in the plane, and is moved so that the pair of edges are respectively imaged at a beginning and an end of scanning exposure onto a light shielding border by the optical system to change a width of an illuminated region with respect to a scan direction at both the beginning and the end of the scanning exposure.