The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6900082 B1

PDF
Full Text
Expired
Date of Patent:
May. 31, 2005

Filed:

Feb. 24, 2003
Applicants:

Man Wong, Hong Kong, HK;

Tianfu MA, Clear Water Bay, HK;

Zhiguo Meng, Clear Water Bay, HK;

Inventors:

Man Wong, Hong Kong, HK;

Tianfu Ma, Clear Water Bay, HK;

Zhiguo Meng, Clear Water Bay, HK;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/00 ; H01L021/84 ;
U.S. Cl.
CPC ...
Abstract

The present invention provides a method for forming metal-induced laterally crystallized polysilicon in which the metal residue is reduced. A first low temperature lateral crystallization is performed using a metal crystallization-inducing agent such as nickel or a nickel compound. A second lateral crystallization is then carried out which may be either a low-temperature crystallization using metal residue from the first crystallization as the metal crystallization-inducing agent, or may be a high temperature crystallization that does not require a metal.


Find Patent Forward Citations

Wong, Man. (2005). Methods for forming laterally crystallized polysilicon and devices fabricated therefrom (U.S. Patent No. 6900082). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6900082

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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