The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2005
Filed:
Jul. 29, 2002
James R. Groves, Los Alamos, NM (US);
Paul N. Arendt, Los Alamos, NM (US);
Robert H. Hammond, Los Altos, CA (US);
James R. Groves, Los Alamos, NM (US);
Paul N. Arendt, Los Alamos, NM (US);
Robert H. Hammond, Los Altos, CA (US);
The Regents of the University of California, Los Alamos, NM (US);
Abstract
The present invention is directed towards a process and apparatus for epitaxial deposition of a material, e.g., a layer of MgO, onto a substrate such as a flexible metal substrate, using dual ion beams for the ion beam assisted deposition whereby thick layers can be deposited without degradation of the desired properties by the material. The ability to deposit thicker layers without loss of properties provides a significantly broader deposition window for the process.