The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2005
Filed:
Aug. 06, 2001
Karin Bauer, Oberhaching, DE;
Tanjo Gleissner, Munich, DE;
Konrad Lentner, Mintraching, DE;
Stefan Sassen, Munich, DE;
Josef Schalk, Altheim, DE;
Ralf Voss, West Bloomfield, MI (US);
Karin Bauer, Oberhaching, DE;
Tanjo Gleissner, Munich, DE;
Konrad Lentner, Mintraching, DE;
Stefan Sassen, Munich, DE;
Josef Schalk, Altheim, DE;
Ralf Voss, West Bloomfield, MI (US);
EADS Deutschland GmbH, Munich, DE;
Abstract
A micromechanical rotation speed sensor with a gimbals-mounted structure capable of vibration includes two vibration elements () which are swivelled about two axes (A, B) oriented perpendicular toward each other. An excitation unit in the form of an electrode () sets the first vibration element () into a vibration about the first axis of rotation (A). A read out unit in the form of a read out electrode () records a tipping or vibration of the second vibration element () about the second axis of rotation (B) as a measure for the rotation speed of the sensor. Additional mass elements () which are symmetrically aligned are situated on the upper side () and the underside () of the first vibration element () which form a rocker. The sensor is manufactured of at least three individually processed wafers which are finally joined together and form a top part (), a midsection () and a bottom part ().