The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 24, 2005

Filed:

Dec. 27, 2002
Applicants:

Koji Kato, Sendai, JP;

Koshi Adachi, Sendai, JP;

Yusaku Ishimine, Kokubu, JP;

Inventors:

Koji Kato, Sendai, JP;

Koshi Adachi, Sendai, JP;

Yusaku Ishimine, Kokubu, JP;

Assignee:

Kyocera Corporation, Kyoto, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L041/09 ;
U.S. Cl.
CPC ...
Abstract

In a guide apparatus having an ultrasonic motor as a driving source of a stage, it is intended to accurately comprehend a degree of abrasion between a friction member of a frictionally driven ultrasonic motor and a drive transmitting member of the stage. A guide apparatus is constructed by an ultrasonic motor, a stage capable of moving on the basis of a friction driving with the ultrasonic motor, a position detecting means for detecting a position of the stage, a driving control portion for outputting a driving command signal to the ultrasonic motor, a non-contact type measuring means for measuring a position information of a friction member in the ultrasonic motor, a slip distance measuring portion for calculating a slip distance of the friction member in the ultrasonic motor, and a monitoring portionequipped with tangential force measuring portion for calculating a tangential force applied to a driving surface of the drive transmitting member in the stage on the basis of the friction driving with the ultrasonic motor.


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