The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Jun. 27, 2002
Yoshinori Fujiwara, Yamato, JP;
Yasuhiko Kenjo, Yokohama, JP;
Yoshihiko Watanabe, Yokohama, JP;
Ushiodenki Kabushiki Kaisha, Tokyo, JP;
Abstract
A workpiece stage of a resist curing device is devised in which a workpiece on which a resist has been applied is held on a workpiece stage by vacuum suction, in which the workpiece is irradiated with UV radiation with a simultaneous temperature increase, in which it is cooled after UV radiation and by which the resist is cured, the workpiece stage having heating and cooling arrangements, major warping of the carrier is avoided and reliable holding of the workpiece on the carrier surface by vacuum suction obtained by the carrier being made of an aluminum alloy or a copper alloy which meets the following condition:σ/σ3.1σ labeling the thermal stress which is determined using the following formula:where E is Young's modulus (N/mm) at 200° C., α is the coefficient of linear expansion (1/° C.) at 200° C. and ΔT is a temperature difference (° C.) of 120° C., and σis the fracture point at 200° C.