The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 24, 2005

Filed:

Dec. 14, 2000
Applicants:

Hirohisa Kikuyama, Osaka, JP;

Masahide Waki, Osaka, JP;

Kazuyuki Fujimoto, Osaka, JP;

Yoshinori Nakagawa, Osaka, JP;

Inventors:

Hirohisa Kikuyama, Osaka, JP;

Masahide Waki, Osaka, JP;

Kazuyuki Fujimoto, Osaka, JP;

Yoshinori Nakagawa, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01G041/04 ;
U.S. Cl.
CPC ...
Abstract

A method for purifying tungsten hexafluoride of high purity, capable of producing tungsten hexafluoride of higher purity than that of the related art, readily and at a low cost. A method for purifying tungsten hexafluoride of high purity, characterized in that tungsten hexafluoride containing molybdenum hexafluoride as an impurity, makes contact with a layer, in which a metal or an alloy is packed, containing at least one of molybdenum, tungsten, copper, nickel, iron, cobalt, zinc, titanium, aluminum, calcium, and magnesium at a temperature ranging from 0° C. to 100° C.


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