The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Oct. 03, 2003
Applicants:
Barry Lanier, Allen, TX (US);
Brian E. Zinn, Plano, TX (US);
Inventors:
Barry Lanier, Allen, TX (US);
Brian E. Zinn, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
B24B001/00 ;
U.S. Cl.
CPC ...
Abstract
Light is incident on a semiconductor wafer polish surface and an adjacent reference surface (). The reflected light from each surface is detected by a detector () positioned beneath the surfaces. The signals derived from each source of reflected light is analyzed in a electronic system () and an endpoint for a chemical mechanical polish process is determined as a function of both signals.