The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Mar. 12, 2002
Joichi Nishimura, Kyoto, JP;
Masami Ohtani, Kyoto, JP;
Yasuhiko Hashimoto, Hyogo, JP;
Abstract
A substrate processing apparatus includes a transport robot (TR) formed with a telescopic vertical movement mechanism of a so-called telescopially nestable multi-tier construction. A drive mechanism (D) is initially driven to move a support member () upwardly to simultaneously elevate a vertical movement member (). As the vertical movement member () rises, a pulley () simultaneously moves upwardly. As the pulley () moves upwardly, a vertical movement member () is lifted upwardly by a belt (L). Similar actions elevate a pair of transport arms () provided on the top of a vertical movement member (). The increase in the number of tiers of the nestable multi-tier structure precludes the increase in height of the transport robot (TR) in its retracted position. The substrate processing apparatus, if having an increased height, is capable of transporting a substrate to and from processing portions and eliminates the need to reassemble and adjust the transport robot (TR) for transportation of the apparatus.