The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2005
Filed:
Sep. 04, 1997
Applicants:
Floyd Schemmel, Sherman, TX (US);
Richard Thorne, Sherman, TX (US);
Inventors:
Floyd Schemmel, Sherman, TX (US);
Richard Thorne, Sherman, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
G06K009/00 ;
U.S. Cl.
CPC ...
Abstract
An apparatus and method for automatically detecting defects on silicon dies on silicon wafers comprising a silicon wafer acquisition system () and a computer () connected to said silicon wafer image acquisition system (), wherein said computer () automatically aligns a silicon wafer (), calibrates the image acquisition system (), analyzes die images by determining a statistical die model from a plurality of dies, and compares the statistical die model to silicon die images to determine if the silicon dies have surface defects, is disclosed.