The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2005
Filed:
Aug. 26, 2002
Applicants:
Jūrgen Leib, Freising, DE;
Florian Bieck, Mainz, DE;
Inventors:
Jūrgen Leib, Freising, DE;
Florian Bieck, Mainz, DE;
Assignee:
Schott Glas, Mainz, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L027/14 ; H01L029/82 ; H01L021/00 ;
U.S. Cl.
CPC ...
Abstract
A microelectromechanical component is produced from a substrate having a first side and a second side which is substantially opposite from the first side, at least the first side having at least one microelectromechanical element, by introducing at least one conductive passage is introduced into the substrate, connecting the first side to the second side.