The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2005
Filed:
Dec. 23, 2003
Applicant:
Young-hun Seo, Bucheon, KR;
Inventor:
Young-Hun Seo, Bucheon, KR;
Assignee:
ANAM Semiconductor Inc., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/302 ; H01L021/461 ;
U.S. Cl.
CPC ...
Abstract
A method of fabricating a semiconductor device is disclosed. An example method sequentially forms a gate insulation film and a sacrificial film on a semiconductor substrate. In addition, the example method forms a bowing hollow by selectively etching the sacrificial layer, forms gate material on the gate insulation film exposed through the bowing hollow and the sacrificial film, and forms a gate by anisotropically etching the gate material such that the gate material remains on an inner side wall of the bowing hollow.