The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2005

Filed:

Feb. 25, 2004
Applicants:

Jeremy M. Grace, Penfield, NY (US);

Dennis R. Freeman, Spencerport, NY (US);

Justin H. Klug, Boston, MA (US);

Neil P. Redden, Sodus Point, NY (US);

Inventors:

Jeremy M. Grace, Penfield, NY (US);

Dennis R. Freeman, Spencerport, NY (US);

Justin H. Klug, Boston, MA (US);

Neil P. Redden, Sodus Point, NY (US);

Assignee:

Eastman Kodak Company, Rochester, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/76 ;
U.S. Cl.
CPC ...
Abstract

A thermal physical vapor deposition source for depositing material onto a substrate includes an elongated container for receiving the material, the container having a conductance Cin the elongated direction, and a heater for heating the material in the container to vaporize the material to a partial pressure P. The container has at least one member defining a plurality of apertures arranged along the length of the member, the apertures having a total conductance C, whereinand end heaters for heating each side of the container to reduce condensation of material onto the container.


Find Patent Forward Citations

Loading…