The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2005

Filed:

Jul. 18, 2003
Applicants:

Howard R. Samuels, Newton, MA (US);

David C. Hollocher, Norwood, MA (US);

Michael Judy, Wakefield, MA (US);

Thor Juneau, Berkeley, CA (US);

Inventors:

Howard R. Samuels, Newton, MA (US);

David C. Hollocher, Norwood, MA (US);

Michael Judy, Wakefield, MA (US);

Thor Juneau, Berkeley, CA (US);

Assignee:

Analog Devices, Inc., Norwood, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P015/125 ;
U.S. Cl.
CPC ...
Abstract

Accelerometer offset is reduced by forming mass support structures within an inner periphery of the mass, affixing the mass support structures to the substrate by at least one anchor positioned near the mass' center of mass, and affixing the sensing fingers proximate to the anchor. The mass support structures can be affixed to the substrate using a single anchor or multiple anchors that are positioned close together. The sensing fingers can be affixed to the substrate or to the mass support structures. The mass is typically suspended from within its periphery but toward its outer periphery.


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