The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2005
Filed:
Jul. 14, 2004
Alain Jeanne, Amilly, FR;
Eric Durand, Amilly, FR;
Roger Desailly, Vitry aux Loges, FR;
Newport Corporation, Irvine, CA (US);
Abstract
A specimen positioning mechanism () includes a movable stage () movable along multiple axes, a plate () connected to and supporting a specimen mounting chuck (), multiple linear displacement mechanisms () coupling the plate to the movable stage and mutually spaced apart at different locations between the movable stage and the plate and separately controllable to change distances between the movable stage and the plate, and a flexible member () coupling the movable stage and the plate. The flexible member is motion compliant in three axes of motion. The flexible member in response to linear displacements of the linear displacement mechanisms allows linear and rotational movement of the specimen mounting chuck in the three axes of motion compliance.