The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2005
Filed:
Jul. 18, 2003
Kiyoshi Arakawa, Tochigi, JP;
Kiyoshi Arakawa, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
Openings for transmitting ultraviolet rays are formed in a reticle stage () and a reticle surface plate () for supporting the reticle stage. A chuck groove () is formed in a reticle chuck surface () of a reticle holder (). An opening for transmitting ultraviolet rays is also formed in the holder (). An enclosure () for surrounding the ultraviolet path from the lower end of the stage () toward the vicinity of the reticle surface plate () is attached to the opening of the reticle stage (). A supply port () for supplying purge gas made of inert gas into a space defined by a reticle (), the stage (), the enclosure (), the surface plate (), and a projection optical system () is formed.