The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2005
Filed:
Aug. 28, 2001
Hideki Ashida, Suita, JP;
Junichi Hibino, Neyagawa, JP;
Keisuke Sumida, Hirakata, JP;
Mitsuhiro Ohtani, Sakai, JP;
Shinya Fujiwara, Kyoto, JP;
Hideki Marunaka, Suita, JP;
Tadashi Nakagawa, Takatsuki, JP;
Hideki Ashida, Suita, JP;
Junichi Hibino, Neyagawa, JP;
Keisuke Sumida, Hirakata, JP;
Mitsuhiro Ohtani, Sakai, JP;
Shinya Fujiwara, Kyoto, JP;
Hideki Marunaka, Suita, JP;
Tadashi Nakagawa, Takatsuki, JP;
Matsushita Electric Industrial Co., Ltd., Osaka-fu, JP;
Abstract
An object of the present invention is to provide a method for manufacturing electrodes that can effectively suppress edge-curl when metal electrodes such as bus electrodes and data electrodes are patterned mainly by a photolithography method. In order to achieve the above object, in the manufacturing method in the present invention, an amount of undercut generated by difference in a degree of dissolution caused by developing solution is controlled, and baking is performed at a temperature such that glass in a protrusion formed at side edges becomes soft so as to touch a substrate by gravity. With such method for manufacturing, it becomes possible to make the side edges rounded whose curvature changes continuously.