The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2005
Filed:
Jun. 06, 2002
Hiroyoshi Komobuchi, Kyoto, JP;
Minoru Kubo, Nabari, JP;
Masahiko Hashimoto, Shijonawate, JP;
Michio Okajima, Neyagawa, JP;
Shinichi Yamamoto, Hirakata, JP;
Hiroyoshi Komobuchi, Kyoto, JP;
Minoru Kubo, Nabari, JP;
Masahiko Hashimoto, Shijonawate, JP;
Michio Okajima, Neyagawa, JP;
Shinichi Yamamoto, Hirakata, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
An Al film is formed on a cap wafer and the Al film is patterned into a ring-shaped film. Dry etching is performed by using the ring-shaped film as a mask to form a drum portion enclosing a recess portion to provide a vacuum dome. After forming a depth of cut into the substrate portion of the cap wafer, the cap wafer is placed on a main body wafer having an infrared area sensor formed thereon. Then, the ring-shaped film of the cap wafer and the ring-shaped film of the main body wafer are joined to each other by pressure bonding to form a ring-shaped joining portion.