The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2005
Filed:
Mar. 07, 2002
Applicants:
Junichi Karaswaw, Shimosuwa-machi, JP;
Vikram Joshi, Colorado Springs, CO (US);
Inventors:
Junichi Karaswaw, Shimosuwa-machi, JP;
Vikram Joshi, Colorado Springs, CO (US);
Assignees:
Symetrix Corporation, Colorado Springs, CO (US);
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/00 ;
U.S. Cl.
CPC ...
Abstract
In the manufacture of an integrated circuit memory cell, a strontium bismuth tantalate or strontium bismuth tantalum niobate thin film layer () is deposited on a substrate () and a carefully controlled UV baking process is performed on the strontium bismuth tantalate layer () prior to the deposition of an ultra-thin bismuth tantalate layer (). A second electrode () is formed on top of the ultra-thin bismuth tantalate layer ().