The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2005
Filed:
May. 07, 2002
Nobuhiro Mukuta, Kyoto, JP;
Jun Kawai, Kyoto, JP;
Kiyoshi Akao, Kyoto, JP;
Osamu Horiguchi, Kyoto, JP;
Nobuhiro Mukuta, Kyoto, JP;
Jun Kawai, Kyoto, JP;
Kiyoshi Akao, Kyoto, JP;
Osamu Horiguchi, Kyoto, JP;
Abstract
A method of preparing a schedule for a substrate processing apparatus. A plurality of lots are processed by the substrate processing apparatus including a plurality of processing sections for processing substrates. An order of processing the lots is determined based on a recipe including a plurality of processing steps for successively processing the lots in the processing sections. The method includes, in determining the processing order, a step of allocating a first processing step for one of the lots, and thereafter allocating, as a next processing step, one of next processing steps for the lots preceded by a processing step having the earliest