The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2005
Filed:
Nov. 29, 2001
Martin E. Lee, Saratoga, CA (US);
Mike Binnard, Belmont, CA (US);
Douglas C. Watson, Campbell, CA (US);
Martin E. Lee, Saratoga, CA (US);
Mike Binnard, Belmont, CA (US);
Douglas C. Watson, Campbell, CA (US);
Nikon Corporation, , JP;
Abstract
A stage assembly () for moving and positioning a device () includes a device table (), a device holder () that retains the device (), and a stage mover assembly (). The stage assembly () includes one or more features that can isolate the device holderand the device () from deformation. In some embodiments, the stage assembly () allows precise rotation of the device () between a first position () and a second position () without influencing the flatness of the device () and without deflecting and distorting the device (). For example, the stage assembly () can include a carrier () and a holder connector assembly (). The carrier () is supported above the device table () and rotates relative to the device table (). The holder connector assembly () connects the device holder () to the carrier (). Further, the stage assembly () can include a holder mover () that rotates the device holder () relative to the device table (). Additionally, the stage assembly () can include a fluid connector () that connects the device holder () in fluid communication with the device table ().