The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2005

Filed:

Feb. 07, 2003
Applicants:

Yunlong Sun, Beaverton, OR (US);

Robert F. Hainsey, Portland, OR (US);

Lei Sun, Aloha, OR (US);

Inventors:

Yunlong Sun, Beaverton, OR (US);

Robert F. Hainsey, Portland, OR (US);

Lei Sun, Aloha, OR (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/82 ;
U.S. Cl.
CPC ...
Abstract

A set () of one or more laser pulses () is employed to remove passivation layer () over a conductive link (). The link () can subsequently be removed by a different process such as chemical etching. The duration of the set () is preferably shorter than 1,000 ns; and the pulse width of each laser pulse () within the set () is preferably within a range of about 0.05 ps to 30 ns. The set () can be treated as a single 'pulse' by conventional laser positioning systems () to perform on-the-fly material removal without stopping whenever the laser system () fires a set () of laser pulses () at each target area (). Conventional wavelengths in the IR range or their harmonics in the green or UV range can be employed.


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