The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2005
Filed:
Nov. 25, 2003
Applicant:
Kwan-ju Koh, Bucheon, KR;
Inventor:
Kwan-Ju Koh, Bucheon, KR;
Assignee:
ANAM Semiconductor Inc., Seoul, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/76 ;
U.S. Cl.
CPC ...
Abstract
A semiconductor device having an interlayer insulation film with a low capacitance and a method of fabricating the same are disclosed. An example semiconductor device having a multi-layered metal wire structure includes first and second interlayer insulation films provided between lower metal wire layers and upper metal wire layers. The example semiconductor device also includes air gaps formed in the first interlayer insulation film at an interlevel between the upper and lower metal wire layers and via holes connecting the upper and lower metal wire layers.