The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2005

Filed:

Nov. 09, 2001
Applicants:

Robert B. Ford, West Reading, PA (US);

Christopher A. Michaluk, Gilbertsville, PA (US);

Inventors:

Robert B. Ford, West Reading, PA (US);

Christopher A. Michaluk, Gilbertsville, PA (US);

Assignee:

Cabot Corporation, Boston, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C014/34 ;
U.S. Cl.
CPC ...
Abstract

Sputtering targets and methods of making sputtering targets are described. The method includes the steps of: providing a sputtering metal workpiece made of a valve metal; transverse cold-rolling the sputtering metal workpiece to obtain a rolled workpiece; and cold-working the rolled workpiece to obtain a shaped workpiece. The sputtering targets exhibits a substantially consistent grain structure and/or texture on at least the sidewalls.


Find Patent Forward Citations

Ford, Robert. (2005). Hollow cathode target and methods of making same (U.S. Patent No. 6887356). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6887356

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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