The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2005
Filed:
Jul. 11, 2003
Ji-guang Zhang, Marietta, GA (US);
Lamartine Meda, Atlanta, GA (US);
Eleston Maxie, Marietta, GA (US);
Ji-Guang Zhang, Marietta, GA (US);
Lamartine Meda, Atlanta, GA (US);
Eleston Maxie, Marietta, GA (US);
Excellatron Solid State, LLC, Atlanta, GA (US);
Abstract
An apparatus for producing a thin film electrolyte is provided wherein a volatile lithium-containing precursor and a volatile phosphate-containing precursor are mixed into a plasma generated from a plasma source. The mixture is then deposited upon a substrate. The apparatus has a plasma source () having a primary plenum () and a secondary plenum (). The primary plenum is in fluid communication with a source of nitrogen gas () and a source of hydrogen gas (). The secondary plenum is in fluid communication with a first bubbler () and a second bubbler ().