The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2005
Filed:
Mar. 20, 2002
Martin Ross-messemer, Essingen, DE;
Alexander Menck, Jena, DE;
Frank Höller, Aalen, DE;
Kurt Franke, Dresden, DE;
Günter Martin, Dresden, DE;
Hagen Schmidt, Leipzig, DE;
Manfred Weihnacht, Malter, DE;
Martin Ross-Messemer, Essingen, DE;
Alexander Menck, Jena, DE;
Frank Höller, Aalen, DE;
Kurt Franke, Dresden, DE;
Günter Martin, Dresden, DE;
Hagen Schmidt, Leipzig, DE;
Manfred Weihnacht, Malter, DE;
Carl-Zeiss-Stiftung (trading as Carl Zeiss), Heidenheim (Brenz), DE;
Abstract
A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate, a surface wave sourceexcitable with an adjustable frequency for producing surface waves on a surfaceof the substrateand an interaction regionof the substrate surfacewhich is provided for the radiation to interact with a grating structure provided by the surface waves produced. To this end, the surface wave sourcemay have a directional characteristic and emits surface waves stronger in a preferred directionthan in a directionopposite thereto, the surface wave source may comprises an electro-acoustic transducer which includes spaced apart sections for emitting surface waves at different wavelengths, an electro-acoustic transducer of the surface wave source may be operated as a voltage divider with an intermediate electrode, the frequency for exciting the surface wave source may be adjusted in response to a measuring signal which is obtained by a surface wave receiver, a surface wave dampermay be provided in the form of an acousto-electric transducer, a closed propagation path may be provided for the surface waves and the grating structure may be formed by standing surface waves. Moreover, an exposure system is proposed which comprises such a diffraction-optical component and a radiation source.