The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2005
Filed:
Jan. 22, 2004
Applicant:
Kwan Ju Koh, Bucheon-si, KR;
Inventor:
Kwan Ju Koh, Bucheon-si, KR;
Assignee:
ANAM Semiconductor, Inc., Seoul, KR;
Primary Examiner:
Int. Cl.
CPC ...
H01L021/336 ;
U.S. Cl.
CPC ...
Abstract
A manufacturing method for a non-volatile memory device includes the steps of forming a well and a channel in a silicon substrate, depositing a tunnel oxide layer, a first polysilicon layer and a nitride layer sequentially, and then performing a trench etching thereof to thereby form a self-align flash memory device.