The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2005
Filed:
Apr. 18, 2003
Jeffrey M. Peterson, Santa Barbara, CA (US);
Jeffrey M. Peterson, Santa Barbara, CA (US);
Raytheon Company, Waltham, MA (US);
Abstract
A wafer structure is deposited on a composite substrate structure having at least two substrate layers bonded together. A first substrate layer is made of a first substrate material having a first-substrate-layer material transverse coefficient of thermal expansion, greater than the wafer transverse coefficient of thermal expansion, and a second substrate layer is made of a second substrate material having a second-substrate-layer material transverse coefficient of thermal expansion, measured parallel to the transverse direction, less than the wafer transverse coefficient of thermal expansion. The substrate layers are present in relative proportions such that the substrate transverse coefficient of thermal expansion differs from the wafer transverse coefficient of thermal expansion by not more than about 2×10/° F.