The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6884640 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 26, 2005

Filed:

May. 13, 2003
Applicants:

Jeffrey J. Peterson, Austin, TX (US);

Charles E. Hunt, Davis, CA (US);

Peter J. Bjeletich, Davis, CA (US);

Inventors:

Jeffrey J. Peterson, Austin, TX (US);

Charles E. Hunt, Davis, CA (US);

Peter J. Bjeletich, Davis, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/66 ;
U.S. Cl.
CPC ...
Abstract

One embodiment of the present invention provides a system that determines the composition of a layer within an integrated device. The system operates by first receiving the integrated device. Next, the system measures properties of the layer using electromagnetic radiation. The properties of the layer measured are used to determine an index of refraction for the layer. The system then solves for the composition of the layer using the index of refraction.


Find Patent Forward Citations

Peterson, Jeffrey. (2005). Method and apparatus for determining layer thickness and composition using ellipsometric evaluation (U.S. Patent No. 6884640). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6884640

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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