The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2005
Filed:
Dec. 19, 2002
Yi Chang, Hsin Chu, TW;
Jih-yi Wang, Hsin Chu, TW;
Mao-kuo Wei, Hsin Chu, TW;
Tien-rong LU, Hsin Chu, TW;
Yi Chang, Hsin Chu, TW;
Jih-Yi Wang, Hsin Chu, TW;
Mao-Kuo Wei, Hsin Chu, TW;
Tien-Rong Lu, Hsin Chu, TW;
RiTdisplay Corporation, Hsinchu, TW;
Abstract
A deposition apparatus for organic light emitting devices. The deposition apparatus includes a substrate conveying system and at least a chamber. In this case, the substrate conveying system is a circular turntable shape. The chambers are provided around the substrate conveying system in a specific order. While the substrate conveying system rotates in a circular direction, at least a substrate is transferred into the chambers for deposition. The substrate carrier, a shadow mask and a shadow mask alignment system, are positioned on the substrate carrier. After the deposition, at least a layer is deposited on each of the substrates, so as to manufacture at least an organic light-emitting device.