The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2005
Filed:
Jan. 22, 2003
Masami Murai, Nagano, JP;
Xin-shan LI, Nagano, JP;
Masami Murai, Nagano, JP;
Xin-Shan Li, Nagano, JP;
Seiko Epson Corporation, , JP;
Abstract
The present invention provides a piezoelectric element having consistently high piezoelectric characteristics, and a method for manufacturing a liquid jetting head in which this element is used, by obtaining a degree of orientation that is suitable for a piezoelectric thin film, stably and with good reproducibility. A Ti film is formed on a layered bottom electrode, piezoelectric material layers constituting a piezoelectric thin filmis formed a plurality of cycles of layer formation, and a top electrodeis formed on the piezoelectric thin filmto produce a piezoelectric element. When the piezoelectric material layers are formed, the annealing temperature of the first cycle of layer formation is set higher than the annealing temperature of the other cycles of layer formation. In addition, the annealing time of the first cycle of layer formation is made longer than the annealing time of the other cycles of layer formation. The degree of orientation in the 100 plane is thereby increased, and the bottom electrode can be prevented from undergoing oxidation or Pd diffusion.