The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2005
Filed:
Dec. 05, 2001
Anastasios J. Tousimis, North Bethesda, MD (US);
Chris Tousimis, North Bethesda, MD (US);
Yianni Tousimis, Annapolis, MD (US);
Anastasios J. Tousimis, North Bethesda, MD (US);
Chris Tousimis, North Bethesda, MD (US);
Yianni Tousimis, Annapolis, MD (US);
Tousimis Research Corporation, Rockville, MD (US);
Abstract
Multipurpose holders for electronic components utilized during a fabrication process must allow the components to be submerged into baths of hydrofluoric acid, rinsed in de-ionized water (D.I.), placed into baths of alcohol for dehydration, and ultimately dried prior to further processing. The holders provide both fluid flow around the wafers while in each bath of fluid and while being processed by the critical point dryer, and a containment system to keep the wafer submerged in fluid at all times during the transfer between baths and the drying equipment.