The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2005
Filed:
Oct. 30, 2002
Carl Francis Sermon, Los Gatos, CA (US);
Terry Fredrick Banitt, Altura, MN (US);
John Patrick Hagen, Rochester, MN (US);
Roger Willard Johnson, Harmony, MN (US);
George Mcdonald Moorefield, Ii, Raleigh, NC (US);
Thomas Donald Weller, Rochester, MN (US);
Carl Francis Sermon, Los Gatos, CA (US);
Terry Fredrick Banitt, Altura, MN (US);
John Patrick Hagen, Rochester, MN (US);
Roger Willard Johnson, Harmony, MN (US);
George McDonald Moorefield, II, Raleigh, NC (US);
Thomas Donald Weller, Rochester, MN (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A lapping plate topography system includes a measuring apparatus for measuring the surface of a lapping plate, and an analysis apparatus for analyzing and presenting the data resulting from such measurements. The measurement apparatus has a non-contacting capacitive probe for measuring a height of the surface of the lapping plate, a rotary arm assembly for moving the probe in an arc over the surface of the lapping plate, and a spindle assembly for rotating the lapping plate about its center. The computer-based analysis apparatus is operable to input from the measurement apparatus the measured height at a plurality of data points on the surface of the lapping plate, calculate Fourier transform harmonic coefficients based on the plurality of measured heights, calculate surface ripple coefficients based on the calculated Fourier transform harmonic coefficients, and output the calculated surface ripple coefficients to an appropriate display device.