The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2005
Filed:
Jul. 28, 2003
David Keith Bowen, Warwick, GB;
Ladislav Pina, Praha, CZ;
Adolf Inneman, Praha, CZ;
Rene Hudec, Praha, CA;
Stephan Menzer, West Yorkshire, GB;
David Keith Bowen, Warwick, GB;
Ladislav Pina, Praha, CZ;
Adolf Inneman, Praha, CZ;
Rene Hudec, Praha, CA;
Stephan Menzer, West Yorkshire, GB;
Bede Scientific Instruments Ltd., Durham, GB;
Abstract
The invention provides a miniaturized multi-foil object for use in a laboratory environment and other practical applications that require small or portable and/or disposable high energy radiation optics. Specifically, the invention finds utility in high energy lithographic systems, such as X-ray or EUV lithography, as a condenser optic or in topographic systems. In lithographic systems, the present invention exhibits square symmetry, a relatively large aperture size, and disposability. Additionally, the multi-foil optic of the invention provides a high throughput efficiency.