The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2005
Filed:
Dec. 26, 2002
Takeshi Harada, Niigata, JP;
Hideaki Yoshida, Osaka, JP;
Tetsuya Ueda, Osaka, JP;
Masashi Hamanaka, Nara, JP;
Takeshi Harada, Niigata, JP;
Hideaki Yoshida, Osaka, JP;
Tetsuya Ueda, Osaka, JP;
Masashi Hamanaka, Nara, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
After a plurality of grooves are formed in an insulating film, a barrier metal film and a conductive film are deposited successively on the insulating film such that each of the grooves is filled completely therewith. Subsequently, the portions of the conductive film outside the grooves are removed by polishing and then the portions of the barrier metal film outside the grooves are removed by polishing. Thereafter, a foreign matter adhered to the surface to be polished during polishing is removed and then a surface of the insulating film is polished.