The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2005
Filed:
Nov. 18, 2002
Gil Ching, Le bar sur Loup, FR;
Vincent Perrut, Voreppe, FR;
Vincent Ruch, Draguignan, FR;
Gilles Fresquet, Castenet Tolosan, FR;
Gil Ching, Le bar sur Loup, FR;
Vincent Perrut, Voreppe, FR;
Vincent Ruch, Draguignan, FR;
Gilles Fresquet, Castenet Tolosan, FR;
Techsonic, Antibes, FR;
Recif, Inc., Aussonne, FR;
Abstract
Embodiments of the invention are directed to substrate processing apparatuses and methods for processing substrates. In one embodiment, a substrate processing apparatus includes a processing chamber, a substrate holder inside of the processing chamber for holding a substrate, and a sonic box in the processing chamber for supplying sonic waves substantially perpendicularly to the substrate. The sonic box may comprises a membrane, and a transducer coupled to the membrane.