The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2005
Filed:
Dec. 13, 2002
Toshiyuki Yokoue, Shiga-ken, JP;
Shuhichi Odahara, Kanagawa-ken, JP;
Kohichi Toriumi, Shiga-ken, JP;
Hiroyuki Kamiya, Shiga-ken, JP;
Toshiyuki Yokoue, Shiga-ken, JP;
Shuhichi Odahara, Kanagawa-ken, JP;
Kohichi Toriumi, Shiga-ken, JP;
Hiroyuki Kamiya, Shiga-ken, JP;
International Business Machines Corporation, Armonk, NY (US);
Abstract
Disclosed are a fixing device and method of fixing substrate to provide holding means capable of surely fixing and positioning a sheet-like substrate even in vacuum, and to provide an operational mechanism thereof. A fixing device includes: a carrier plate for setting a glass substrate thereon; a claw for pressing the glass substrate set on the carrier plate, when the glass substrate is set thereon, by sandwiching the glass substrate from the periphery thereof; and an airbag having air sealed therein and expanding by lowering an external pressure. The claw is operated by using expansion of the airbag as power, thereby fixing the glass substrate.