The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2005
Filed:
May. 20, 2003
Yang Ju, Sendai, JP;
Masumi Saka, Sendai, JP;
Hiroyuki Abe, Sendai, JP;
Tohoku Techno Arch Co., Ltd., , JP;
Abstract
The invention provides a noncontact measuring system for electrical conductivity, which uses a microwave. In the measuring system for electrical conductivity, the microwave generated in a network analyzer (NA)is guided to a surface of a silicon wafer (sample)through a waveguideand a sensor. The surface of the silicon waferis irradiated with the microwave, and the sensorreceives the reflected microwave. The electrical conductivity of the silicon waferis measured in such a manner that a computer (personal computer)calculates the electrical conductivity from an amplitude ratio A and phase difference θ to a reflected wave of the silicon wafer, which is determined with the network analyzer. The computerperforms not only the calculation of the measurement but also whole control of the measuring system such as positioning of the sample.