The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2005
Filed:
Mar. 25, 2002
Applicant:
Shinji Yamaguchi, Aichi Pref., JP;
Inventor:
Shinji Yamaguchi, Aichi Pref., JP;
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/00 ; C23C016/00 ;
U.S. Cl.
CPC ...
Abstract
A supporting structure for attaching a ceramic susceptor into a processing chamber is provided. The ceramic susceptor is used for placing and heating an article to be processed. The supporting structure has one or more supporting projections integrally provided on a back face of the ceramic susceptor and one or more supporting members mounted to the processing chamber and separated from the supporting projections. At least a part of the supporting member is made from a heat-insulating material and the supporting projection is attached to the supporting member by mechanical means.