The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2005
Filed:
Jul. 31, 2003
Applicant:
Nobuto Kawahara, Tochigi, JP;
Inventor:
Nobuto Kawahara, Tochigi, JP;
Assignee:
Canon Kabushiki Kaisha, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B027/32 ; G03B027/54 ; G03B027/72 ;
U.S. Cl.
CPC ...
Abstract
An illumination optical system for illuminating a mask using light from a light source includes a shape varying mechanism for continuously making a shape of an effective light source variable, wherein the shape varying mechanism includes a first stop plate that has a first aperture part for allowing the light to pass through the first aperture part, and a second stop plate that has second aperture part for allowing the light that has passed through the first stop plate through the second aperture part.