The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2005
Filed:
Jun. 06, 2003
Hendrik Walde, Fort Collins, CO (US);
Brian Kowal, Fort Collins, CO (US);
Hendrik Walde, Fort Collins, CO (US);
Brian Kowal, Fort Collins, CO (US);
Advanced Energy Industries, Inc., Fort Collins, CO (US);
Abstract
This invention teaches an arc detection and arc reduction circuit for use with power supplies for delivering power to a plasma processing system that utilizes a resonant circuit that stores energy and when the voltage drops between the cathode and anode of the processing chamber the stored energy generates a current in a current transformer in response to the voltage change to switch a magnetically coupled inductor in parallel with the cathode and anode causing a reversal of the voltage that reduces arcs in the plasma chamber. In an alternate embodiment the magnetically coupled inductor is replaced by a pulse transformer and the pulse transformer is placed in parallel with the cathode and anode causing a reversal of the voltage that reduces arcs in the plasma chamber.