The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2005
Filed:
Nov. 08, 2002
Shawn Jay Cunningham, Colorado Springs, CO (US);
Dana Richard Dereus, Colorado Springs, CO (US);
Subham Sett, Colorado Springs, CO (US);
Svetlana Tatic-lucic, Bethlehem, PA (US);
Shawn Jay Cunningham, Colorado Springs, CO (US);
Dana Richard DeReus, Colorado Springs, CO (US);
Subham Sett, Colorado Springs, CO (US);
Svetlana Tatic-Lucic, Bethlehem, PA (US);
Turnstone Systems, Inc., Santa Clara, CA (US);
Wispry, Inc., Cary, NC (US);
Abstract
MEMS Device Having A Trilayered Beam And Related Methods. According to one embodiment, a movable, trilayered microcomponent suspended over a substrate is provided and includes a first electrically conductive layer patterned to define a movable electrode. The first metal layer is separated from the substrate by a gap. The microcomponent further includes a dielectric layer formed on the first metal layer and having an end fixed with respect to the substrate. Furthermore, the microcomponent includes a second electrically conductive layer formed on the dielectric layer and patterned to define an electrode interconnect for electrically communicating with the movable electrode.