Fluorinated cycloolefin polymers, processes for preparation of fluorinated cycloofefin monomers and polymers thereof, and use of the same

Abstract

The present invention is to provide a fluorine-containing polymer having excellent light transmission in the vacuum ultraviolet region of not more than 193 nm, a monomer favorably used for preparing the fluorine-containing polymer, a process for preparing the fluorine-containing polymer, and uses of the fluorine-containing polymer. The fluorine-containing polymer has at least a repeated unit structure represented by the following formula (1) and has an absorption coefficient of not more than 3.0 μmat 157 nm of ultraviolet rays.wherein Rto Rare each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, or the like; Xis —CRR—, —NR— or —PR— (Rand Rare each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, hydrogen, —O—, —S—, an alkyl group of 1 to 20 carbon atoms, or the like); at least one of Rto Rand Xis fluorine or a fluorine-containing group; and n is 0 or an integer of 1 to 3.